3M™ BETAPURE™ AUL SERIES FILTER CARTRIDGES REPRESENT A NEW GENERATION IN CHEMICAL MECHANICAL PLANARIZATION (CMP) SLURRY CLASSIFICATION PROVIDING SUPERIOR REDUCTION OF LARGE PARTICLE COUNTS FOR IMPROVED YIELDS. FEATURING BI-COMPONENT FIBER TECHNOLOGY WITH TARGETED MULTIZONE FILTRATION LAYERS FROM 3M TO ENABLE LARGE PARTICLE COUNT (LPC) REDUCTION AND YIELD IMPROVEMENT IN THE MOST ADVANCED CMP PROCESSES.